The metallurgical characterization of coatings

This paper reviews some of the metallurgical characterization techniques used at Battelle Northwest for coatings made by high rate sputter deposition methods. The paper includes specific examples and a discussion of problems encountered during characterization. Characterization techniques used inclu...

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Bibliographic Details
Published in:Thin solid films 1978-08, Vol.53 (1), p.41-54
Main Authors: Dahlgren, S.D., Patten, J.W., Thomas, M.T.
Format: Article
Language:English
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Summary:This paper reviews some of the metallurgical characterization techniques used at Battelle Northwest for coatings made by high rate sputter deposition methods. The paper includes specific examples and a discussion of problems encountered during characterization. Characterization techniques used include (1) X-ray and electron diffraction for crystal structure determination, (2) X-ray diffraction, optical, scanning electron and transmission electron metallography for microstructural characterization, (3) numerous chemical analysis techniques for bulk alloy composition, gas content, trace impurity analysis and variable composition determinations and (4) a listing of property measurements needed for various purposes. It is hoped that the novelty of these examples will stimulate new approaches to coating characterization at other laboratories.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(78)90371-1