Some Observations Of The Effects Of Partial Coherence On Projection System Imagery

Partially coherent illumination significantly affects projection system performance. Our theoretical and experimental results cover a variety of test objects imaged with different projection system assemblies, including some nonuniform sources, and show that improved optical lithography performance...

Full description

Saved in:
Bibliographic Details
Published in:Optical Engineering 1983-12, Vol.22 (6), p.226720-226720
Main Authors: Dente, Gregory C, Osgood, Jeffrey S
Format: Article
Language:English
Subjects:
Exact sciences and technology
Fundamental areas of phenomenology (including applications)
Lenses, prisms, and mirrors
Optical elements, devices, and systems
Optics
Physics
Citations: Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Partially coherent illumination significantly affects projection system performance. Our theoretical and experimental results cover a variety of test objects imaged with different projection system assemblies, including some nonuniform sources, and show that improved optical lithography performance can be realized.
ISSN:0091-3286
1560-2303
DOI:10.1117/12.7973228