Analysis of coatings and thin films using energetic ions

Energetic ion analysis techniques provide non-destructive information on the depth distribution of atomic composition in the near-surface (1–10 μm) region of a solid sample. The techniques are quantitative and are not complicated by the presence of chemical or matrix effects. Generalized nuclear rea...

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Bibliographic Details
Published in:Thin solid films 1979-01, Vol.64 (3), p.403-407
Main Author: Borders, J.A.
Format: Article
Language:English
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Summary:Energetic ion analysis techniques provide non-destructive information on the depth distribution of atomic composition in the near-surface (1–10 μm) region of a solid sample. The techniques are quantitative and are not complicated by the presence of chemical or matrix effects. Generalized nuclear reaction analysis is described and its application to the measurement of the stoichiometry of Ta 2O 5 films and BeO coatings on Cu-Be is briefly discussed.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(79)90323-7