Elimination of thickness dependence from medium resolution electron holograms

We show that a composition image that is independent of thickness can be obtained by suitably combining the phase and amplitude images extracted from an off-axis electron hologram. This image is the product of the mean inner potential of the material and the mean-free-path for inelastic scattering....

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Bibliographic Details
Published in:Ultramicroscopy 1994-03, Vol.53 (3), p.291-296
Main Authors: Gajdardziska-Josifovska, M., McCartney, M.R.
Format: Article
Language:English
Subjects:
Electron, positron and ion microscopes, electron diffractometers and related techniques
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
Scanning probe microscopes, components, and techniques
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Summary:We show that a composition image that is independent of thickness can be obtained by suitably combining the phase and amplitude images extracted from an off-axis electron hologram. This image is the product of the mean inner potential of the material and the mean-free-path for inelastic scattering. The method used has been evaluated using single crystal Si wedges with known linearly increasing thickness, and it has then been applied to CoSi 2/ Si epitaxial interfaces with unknown thickness. Thickness independent images of Si show constant contrast while images of hetero interface emphasize compositional differences.
ISSN:0304-3991
1879-2723
DOI:10.1016/0304-3991(94)90041-8