HALVFEM-a computer program for two-dimensional finite element analysis of semiconductor devices

A computer program for two-dimensional analysis of semiconductor devices has been developed. The basic semiconductor equations are solved using the finite clement method. Results from calculations on short channel MOS transistors arc presented and compared to experimental results.

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Bibliographic Details
Published in:International journal of electronics 1981-01, Vol.50 (1), p.15-26
Main Authors: ARNBORG, T., BJÖRKQVIST, K.
Format: Article
Language:English
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Description
Summary:A computer program for two-dimensional analysis of semiconductor devices has been developed. The basic semiconductor equations are solved using the finite clement method. Results from calculations on short channel MOS transistors arc presented and compared to experimental results.
ISSN:0020-7217
1362-3060
DOI:10.1080/00207218108901216