The proton magnetic resonance study for hydrogen behavior in three hydrogenated silicon films

The proton magnetic resonance spectrum of three hydrogenated silicon films (nc-Si:H, a-Si:H, annealed a-Si:H) were presented, which confirm the compositional inhomegeneity for hydrogen in the dilute and clustered phase. The deposition or post preparation condition was important for the formation of...

Full description

Saved in:
Bibliographic Details
Published in:Solid state communications 1992, Vol.83 (6), p.411-412
Main Authors: Xuan, Qu Xue, Xia, Hua, Zhang, Xing Kui, Feng, Duan
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Exact sciences and technology
Magnetic resonances and relaxations in condensed matter, mössbauer effect
Nuclear magnetic resonance and relaxation
Physics
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The proton magnetic resonance spectrum of three hydrogenated silicon films (nc-Si:H, a-Si:H, annealed a-Si:H) were presented, which confirm the compositional inhomegeneity for hydrogen in the dilute and clustered phase. The deposition or post preparation condition was important for the formation of the clustered SiH phase, not only for the spatial distance between SiH bond, but for some subtle structure in NMR spectrum. The hydrogen glass behavior in silicon films was essential for the explanation of experimental results.
ISSN:0038-1098
1879-2766
DOI:10.1016/0038-1098(92)90078-N