An inelastic mechanism for ion induced desorption of oxygen from titanium and iron

Measurements are reported of the cross sections for desorption or sputtering of oxygen from polycrystalline Ti, and Fe by H +, H 2 + and H 3 + in the energy range 20 to 200 keV. At low energies the desorption cross sections are a few times 10 −18 cm 2 and are believed due to a conventional sputterin...

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Bibliographic Details
Published in:Surface science 1981-08, Vol.109 (1), p.11-19
Main Authors: Legg, K.O., Whaley, R., Thomas, E.W.
Format: Article
Language:English
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Summary:Measurements are reported of the cross sections for desorption or sputtering of oxygen from polycrystalline Ti, and Fe by H +, H 2 + and H 3 + in the energy range 20 to 200 keV. At low energies the desorption cross sections are a few times 10 −18 cm 2 and are believed due to a conventional sputtering mechanism involving kinematic transfer of energy. At energies above 40 keV proton for Fe and 80 keV proton for Ti the cross sections for desorption by molecular ions show a sharp rise indicating onset of some new inelastic desorption mechanism. We propose that this mechanism is electron stimulated desorption initiated by electrons stripped from the projectiles and having the same speed as the projectile.
ISSN:0039-6028
1879-2758
DOI:10.1016/0039-6028(81)90507-0