Materials of construction for silicon crystal growth

The performance of materials for construction and in contact with molten silicon for crystal growth is presented. The basis for selection considers physical compatibility, such as thermal expansion and strength, as well as chemical compatibility as indicated by contamination of the silicon. A number...

Full description

Saved in:
Bibliographic Details
Published in:Journal of crystal growth 1980-01, Vol.50 (1), p.366-377
Main Authors: Leipold, M.H., O'Donnell, T.P., Hagan, M.A.
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The performance of materials for construction and in contact with molten silicon for crystal growth is presented. The basis for selection considers physical compatibility, such as thermal expansion and strength, as well as chemical compatibility as indicated by contamination of the silicon. A number of new high technology materials are included as well as data on those previously used. Emphasis is placed on the sources and processing of such materials in that results are frequently dependent on the way a material is prepared as well as its intrinsic constituents.
ISSN:0022-0248
1873-5002
DOI:10.1016/0022-0248(80)90260-2