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Influence of the substrate on the crystalline properties of sprayed tin dioxide thin films

Undoped tin dioxide films were produced by the conventional spraying method over five different substrates: commercial glass, fused quartz, monocrystalline Si, 7059 Corning glass and amorphous Si at different substrate temperatures ( T s ). For each kind of substrate, the temperature range in which...

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Bibliographic Details
Published in:Journal of crystal growth 1986, Vol.74 (2), p.439-442
Main Authors: Fantini, M., Torriani, I.L., Constantino, C.
Format: Article
Language:English
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Summary:Undoped tin dioxide films were produced by the conventional spraying method over five different substrates: commercial glass, fused quartz, monocrystalline Si, 7059 Corning glass and amorphous Si at different substrate temperatures ( T s ). For each kind of substrate, the temperature range in which the films became polycrystalline was determined using X-ray diffractometry. The amorphous to polycrystalline transition temperature ( T ap) was found to vary with the type of substrate used. From these results we concluded that for sprayed SnO 2 films the crystallinity of the films depends not only on the deposition temperature but also on the nature of the substrate. Preferential orientation in the [200] direction was noted for all the films deposited at T s < 490°C regardless of substrate nature and temperature.
ISSN:0022-0248
1873-5002
DOI:10.1016/0022-0248(86)90135-1