Composition and properties of the so-called “diamond-like” amorphous carbon films

• Published in: Thin solid films 1984-01, Vol.118 (3), p.311-320
• Main Authors: C. Angus, John, E. Stultz, Janet, J. Shiller, Paul, R. MacDonald, Jack, J. Mirtich, Michael, Domitz, Stan
• Format: Article
• Language: English
• ISSN: 0040-6090; 1879-2731
• DOI: 10.1016/0040-6090(84)90202-5

The composition of amorphous “diamond-like” films made by direct low energy ion beam deposition, r.f. discharge and sputtering was determined by nuclear reaction analysis, IR spectroscopy and microcombustion chemical analysis. The nuclear reaction analysis showed very similar hydrogen depth profiles for all three types of samples. The atomic ration of hydrogen to carbon was approximately 0.2 at the film surface and rose to approximately 1.0 at a depth of 500 Å. The integrated intensity of the CH stretching band at about 2900 cm -1 indicates that the amount of chemically bonded hydrogen is less than the total hydrogen content. Combustion analysis confirmed the overall atomic ratio of hydrogen to carbon determined by nuclear reaction analysis. The chemical state of the non-bonded hydrogen was not determined; however, the effective diffusion coefficient computed from the hydrogen depth profile was extremely low. This indicates either that the films are exceedingly impermeable or that the non-bonded hydrogen requires an additional activated step to leave the films, e.g. desorption or chemical reaction.