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Optical properties of evaporated Y sub 2 O sub 3 films
Study of optical, structural, and chemical properties of Y sub 2 O sub 3 films, deposited onto glass, Ge, and NaCl substrates, shows strong absorption bands at water vibrational frequencies. Although annealing reduces these absorption features, readsorption of water occurs during film aging in a nor...
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Published in: | Thin solid films 1986-01, Vol.139 (2), p.121-132 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Online Access: | Get full text |
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Summary: | Study of optical, structural, and chemical properties of Y sub 2 O sub 3 films, deposited onto glass, Ge, and NaCl substrates, shows strong absorption bands at water vibrational frequencies. Although annealing reduces these absorption features, readsorption of water occurs during film aging in a normal atm. All films exhibit crystalline structure with preferred orientation. |
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ISSN: | 0040-6090 |