On-line Measurement of Sub-ppb Level Hydrogen Peroxide in Ultrapure Water Production Process

An on-line H2O2 analyzer was developed for application to the ultrapure water production process, using a gasometric method. The analyzer consists of a dissolved oxygen (DO) sensor and analyzer, a catalyst that converts H2O2 to O2, and a computer that stores the DO data. H2O2 concentrations were cal...

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Bibliographic Details
Published in:Analytical Sciences 2020/12/10, Vol.36(12), pp.1565-1570
Main Authors: CHOI, Jeongyun, CHUNG, Jinwook
Format: Article
Language:English
Subjects:
Advancements in Instrumentation
Analytical Chemistry
catalyst
Catalysts
Chemistry
Correlation analysis
Dissolved oxygen
DO analyzer
gasometric method
H2O2 analyzer
Hydrogen peroxide
Ion exchange
Ion exchange resins
Mathematical analysis
sub-ppb
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Summary:An on-line H2O2 analyzer was developed for application to the ultrapure water production process, using a gasometric method. The analyzer consists of a dissolved oxygen (DO) sensor and analyzer, a catalyst that converts H2O2 to O2, and a computer that stores the DO data. H2O2 concentrations were calculated by measuring the change in DO concentration before and after the catalyst and using the calculation formula presented in this study. In order to accurately analyze a sub-ppb level of H2O2, a DO meter which can correctly measure the DO concentration at the ppb level was applied. An ion exchange resin with Pd, was selected as an appropriate catalyst since it could decompose 99% of H2O2 to O2 at a space velocity of 120/h. The minimum analysis time was 20 min, and the detection limit was observed to be 0.27 ppb. When the DO concentration of the sample was 1.5 ppb or lower, an H2O2 concentration of 1 ppb or lower was successfully measured. Good correlation, with an R2 value of 0.99, was observed between the measured and calculated H2O2 concentrations.
ISSN:0910-6340
1348-2246
DOI:10.2116/analsci.20A003