Electron beam tester a tool for VLSI components analysis

The increasing complexity of VLSI components requires the use of more powerful tools to verify them. One of these tools, the electron beam tester can bring a new powerful help in various ways during the life of an integrated circuit. The purpose of this paper is to present briefly CAMECA works about...

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Bibliographic Details
Published in:Microelectronic engineering 1987, Vol.7 (2), p.327-332
Main Author: Bourgeon, Gérard
Format: Article
Language:English
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Summary:The increasing complexity of VLSI components requires the use of more powerful tools to verify them. One of these tools, the electron beam tester can bring a new powerful help in various ways during the life of an integrated circuit. The purpose of this paper is to present briefly CAMECA works about electron beam tester.
ISSN:0167-9317
1873-5568
DOI:10.1016/S0167-9317(87)80027-8