Microfabrication of molecular scale microstructures

Microfabrication techniques have been used to prepare a new class of molecular scale microporous materials. These materials are formed by chemically etching slots into alternate layers of a lithographically exposed amorphous superlattice cross section. The slot width is accurately controllable from...

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Bibliographic Details
Published in:Applied physics letters 1987-03, Vol.50 (9), p.504-506
Main Authors: DECKMAN, H. W, ABELES, B, DUNSMUIR, J. H, ROXLO, C. B
Format: Article
Language:English
Subjects:
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Low-dimensional structures (superlattices, quantum well structures, multilayers): structure, and nonelectronic properties
Physics
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
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Summary:Microfabrication techniques have been used to prepare a new class of molecular scale microporous materials. These materials are formed by chemically etching slots into alternate layers of a lithographically exposed amorphous superlattice cross section. The slot width is accurately controllable from 10 Å to more than 500 Å.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.98158