PIG-type compact microwave metal ion source

A compact microwave metal ion source using PIG (Penning lonization Gauge) geometry has been newly developed. This modified PIG ion source introduces a microwave discharge and can generate stable and high density plasma. The size of the source is 60 mm in diameter and 80 mm long. The microwave discha...

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Bibliographic Details
Published in:Japanese Journal of Applied Physics 1987-02, Vol.26 (2), p.L100-L102
Main Authors: YOSHIDA, Y, SUZUKI, N, ONISHI, T, HIROFUJI, Y
Format: Article
Language:English
Subjects:
Electric discharges
Exact sciences and technology
Physics
Physics of gases, plasmas and electric discharges
Physics of plasmas and electric discharges
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Summary:A compact microwave metal ion source using PIG (Penning lonization Gauge) geometry has been newly developed. This modified PIG ion source introduces a microwave discharge and can generate stable and high density plasma. The size of the source is 60 mm in diameter and 80 mm long. The microwave discharge power is 20∼60 W at a frequency of 2.45 GHz. A tantulum ion beam current of 3.2 µA has been measured with the extraction aperture (2 mm diameter) at an extraction voltage of 13 kV.
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.26.l100