Laser enhanced metalorganic chemical vapor deposition crystal growth in GaAs

An enhanced crystal growth of GaAs is observed in metalorganic chemical vapor deposition (MOCVD) under laser illumination. It is difficult to understand this enhancement effect only by a pyrolitic effect and we should consider photochemical processes like photoassisted catalytic or surface effect. T...

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Bibliographic Details
Published in:Applied physics letters 1985-07, Vol.47 (2), p.95-96
Main Authors: AOYAGI, Y, MASUDA, S, NAMBA, S, DOI, A
Format: Article
Language:English
Subjects:
Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.)
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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Summary:An enhanced crystal growth of GaAs is observed in metalorganic chemical vapor deposition (MOCVD) under laser illumination. It is difficult to understand this enhancement effect only by a pyrolitic effect and we should consider photochemical processes like photoassisted catalytic or surface effect. This laser enhancement makes patterned crystal growth in MOCVD possible.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.96208