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Layer thickness influenced irradiation effects of proton beam on MoS2 field effect transistors

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Bibliographic Details
Published in:Nanotechnology 2021-03, Vol.32 (13), p.135204-135204
Main Authors: Huang, Xin-nan, Shi, Jing-yuan, Yao, Yao, Peng, Song-ang, Zhang, Da-yong, Jin, Zhi
Format: Article
Language:English
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ISSN:0957-4484
1361-6528
DOI:10.1088/1361-6528/abd129