Investigation of the surface photochemical basis for metal film nucleation in laser chemical vapor deposition

We report the results of ultraviolet irradiation of monolayers of organoaluminum complexes adsorbed to sapphire. Using surface vibrational spectroscopy, the compositional and structural changes caused by 248 and 193 nm surface illumination are documented. Electronic photochemistry of adsorbed trimet...

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Bibliographic Details
Published in:Applied physics letters 1985-12, Vol.47 (12), p.1288-1290
Main Authors: HIGASHI, G. S, ROTHBERG, L. J
Format: Article
Language:English
Subjects:
Analysing. Testing. Standards
Applied sciences
Condensed matter: structure, mechanical and thermal properties
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Materials science
Measurement of properties and materials state
Metals, semimetals and alloys
Metals. Metallurgy
Nondestructive testing
Physics
Specific materials
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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Summary:We report the results of ultraviolet irradiation of monolayers of organoaluminum complexes adsorbed to sapphire. Using surface vibrational spectroscopy, the compositional and structural changes caused by 248 and 193 nm surface illumination are documented. Electronic photochemistry of adsorbed trimethylaluminum is observed and can lead to nucleation of aluminum on the surface. A strong wavelength dependence to this process is observed which cannot be explained by assuming photochemical yields to be proportional to previously measured surface absorption cross sections. The implications for laser chemical vapor deposition of spatially localized metallic features are discussed.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.96307