Enhancing the dynamic range of deformable mirrors with compression bias

We report the design and testing of a compression-biased thermally-actuated deformable mirror that has a dynamic range larger than the limit imposed by pure-bending stress, negligible higher-order-mode scattering, and a linear defocus response and that is vacuum compatible. The optimum design princi...

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Bibliographic Details
Published in:Optics express 2020-12, Vol.28 (26), p.38480-38490
Main Authors: Cao, Huy Tuong, Ng, Sebastian W S, Noh, Minkyun, Brooks, Aidan, Matichard, Fabrice, Veitch, Peter J
Format: Article
Language:English
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Summary:We report the design and testing of a compression-biased thermally-actuated deformable mirror that has a dynamic range larger than the limit imposed by pure-bending stress, negligible higher-order-mode scattering, and a linear defocus response and that is vacuum compatible. The optimum design principles for this class of actuator are described and a mirror with 370 mD dynamic range is demonstrated.
ISSN:1094-4087
1094-4087
DOI:10.1364/OE.408921