Chemical Vapor Deposition of YBa sub 2 Cu sub 3 O sub 7 Using Metalorganic Chelate Precursors

• Published in: Applied physics letters 1988-10, Vol.53 (18), p.1756-1758
• Main Authors: Panson, A J, Charles, R G, Schmidt, D N
• Format: Article
• Language: English
• ISSN: 0003-6951

Superconducting films of YBa sub 2 Cu sub 3 O sub 7 were prepared using metalorganic chelate precursors at ambient pressure. Barium and yttrium were transported using fluoride-substituted beta -diketonates, while a beta -keto-imide chelate was used for Cu. Deposition at 500 deg C on Al sub 2 O sub 3 and SrTiO sub 3 substrates by reaction with oxygen saturated with room temperature water vapor formed crystalline mixtures of BaF sub 2 , YF sub 3 , and CuO. Superconducting YBa sub 2 Cu sub 3 O sub 7 formed after annealing in Ar/H sub 2 O at 835 deg C followed by O at 900 and 400 deg C with a slow cooling in O to < 200 deg C. A 2.3 mu m film on a (100) SrTiO sub 3 substrate had an onset T sub c of 90K with zero resistance at 70K. The film showed a mixture of c- and a-axis orientation. A similar film on (1102) Al sub 2 O sub 3 showed zero resistance at 65K. 7 ref.--AA