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Electron energy deposition in atomic oxygen
A discrete, time-dependent energy deposition model is developed and applied to the study of high-energy electron-beam (100 eV–10 MeV) deposition in atomic oxygen. Secondary electron distributions are computed and observed to relax to steady-state results. Characteristic relaxation times are shown. T...
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Published in: | Journal of applied physics 1988, Vol.63 (1), p.1-10 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | A discrete, time-dependent energy deposition model is developed and applied to the study of high-energy electron-beam (100 eV–10 MeV) deposition in atomic oxygen. Secondary electron distributions are computed and observed to relax to steady-state results. Characteristic relaxation times are shown. The loss function, mean energies per electron-ion pair production, production efficiencies, and distribution functions are presented for a wide range of energies. The model uses the latest experimental and theoretical cross sections as input. |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.340491 |