Preparation of thin-film YBaCuO quantum interference devices with a lift-off technique

Highly textured and polycrystalline YBaCuO thin films were sputtered on cold MgO single-crystal substrates. After annealing in oxygen for 1 h at 920 °C, the films show critical temperatures Tc,end up to 74.5 K. Superconducting quantum interference devices (dc SQUID’s) structured in ≊1-μm-thick polyc...

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Bibliographic Details
Published in:Applied physics letters 1988-03, Vol.52 (10), p.844-846
Main Authors: HÄUSER, B, DIEGEL, M, ROGALLA, H
Format: Article
Language:English
Subjects:
Applied sciences
Electronics
Exact sciences and technology
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Superconducting devices
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Summary:Highly textured and polycrystalline YBaCuO thin films were sputtered on cold MgO single-crystal substrates. After annealing in oxygen for 1 h at 920 °C, the films show critical temperatures Tc,end up to 74.5 K. Superconducting quantum interference devices (dc SQUID’s) structured in ≊1-μm-thick polycrystalline films with a lift-off technique exhibit a critical current of 2 mA at 5.5 K and 35 μA at 72 K. Voltage modulation can be observed at temperatures up to 63 K.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.99303