Evaluation of the composition of reactively evaporated GeOx thin films from optical transmission and XPS data

Computer simulations of germanium 3d core spectra obtained with reactively evaporated GeOx thin films (x between 0 and 2) have been developed using a modified Sanderson approach, in which five basic sub-units are produced by the conversion of germanium atoms in the primary coordination sphere into e...

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Bibliographic Details
Published in:Journal of materials science 1988-12, Vol.23 (12), p.4363-4368
Main Authors: BEYNON, J, EL-SAMANOUDY, M. M, SHORT, E. L
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Exact sciences and technology
Optical properties and condensed-matter spectroscopy and other interactions of matter with particles and radiation
Optical properties of specific thin films
Physics
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Summary:Computer simulations of germanium 3d core spectra obtained with reactively evaporated GeOx thin films (x between 0 and 2) have been developed using a modified Sanderson approach, in which five basic sub-units are produced by the conversion of germanium atoms in the primary coordination sphere into either -GeOx groups or -0GeOx groups on oxidation. The relative proportion of the five sub-units are adjusted until the best agreement with the experimental XPS spectra is obtained. The volume fraction of germanium in GeOx obtained using an optical transmittance model is compared with the number fraction obtained from XPS data over a range of oxygen partial pressures. 9 refs.
ISSN:0022-2461
1573-4803
DOI:10.1007/BF00551932