External electro-optic integrated circuit probing

An external electro-optic measurement system with subpicosecond resolution has been developed. This electro-optic sampling system is designed to operate as a non-contact probe of voltages in electrical devices and circuits with modified wafer-level test equipment and no special circuit preparation....

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Bibliographic Details
Published in:Microelectronic engineering 1990, Vol.12 (1), p.369-379
Main Authors: Whitaker, J.F., Valdmanis, J.A., Frankel, M.Y., Gupta, S., Chwalek, J.M., Mourou, G.A.
Format: Article
Language:English
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Summary:An external electro-optic measurement system with subpicosecond resolution has been developed. This electro-optic sampling system is designed to operate as a non-contact probe of voltages in electrical devices and circuits with modified wafer-level test equipment and no special circuit preparation. Measurements demonstrate the system's ability to probe continuous and pulsed signals on microwave integrated circuits on arbitrary substrates with single-micron spatial resolution. We also discuss the application of external electro-optic sampling to various aspects of time-domain circuit studies, including the generation of short electrical test pulses using novel photoconductive techniques and the propagation of pulses on interconnects.
ISSN:0167-9317
1873-5568
DOI:10.1016/0167-9317(90)90050-4