Boron doping of diamond thin films

The electrical conductivity of diamond thin films produced by the hot-filament technique is found to increase when diborane is incorporated in the precursor gas mixture. The combination of well-defined bulk conductivity measurements with quantitative secondary-ion mass spectrometry and Raman spectro...

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Bibliographic Details
Published in:Applied physics letters 1989-09, Vol.55 (11), p.1121-1123
Main Authors: MORT, J, KUHMAN, D, MACHONKIN, M, MORGAN, M, JANSEN, F, OKUMURA, K, LEGRICE, Y. M, NEMANICH, R. J
Format: Article
Language:English
Subjects:
Condensed matter: electronic structure, electrical, magnetic, and optical properties
Conductivity phenomena in semiconductors and insulators
Electronic transport in condensed matter
Exact sciences and technology
Low-field transport and mobility
piezoresistance
Physics
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Summary:The electrical conductivity of diamond thin films produced by the hot-filament technique is found to increase when diborane is incorporated in the precursor gas mixture. The combination of well-defined bulk conductivity measurements with quantitative secondary-ion mass spectrometry and Raman spectroscopy shows that the conductivity increase is associated with atomic boron doping and rules out any significant role for a graphitic-type component.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.101676