Eddy currents in a wafer moving in the magnetic field of an electron lens

The eddy currents in a conducting plane moving in a magnetic field of cylindrical symmetry and the resulting deflection of an electron probe on the axis are calculated analytically.

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Bibliographic Details
Published in:Microelectronic engineering 1989, Vol.9 (1), p.263-266
Main Author: Spehr, R.
Format: Article
Language:English
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Description
Summary:The eddy currents in a conducting plane moving in a magnetic field of cylindrical symmetry and the resulting deflection of an electron probe on the axis are calculated analytically.
ISSN:0167-9317
1873-5568
DOI:10.1016/0167-9317(89)90062-2