Scanning capacitance microscopy on a 25 nm scale

A near-field capacitance microscope has been demonstrated on a 25 nm scale. A resonant circuit provides the means for sensing the capacitance variations between a sub-100-nm tip and surface with a sensitivity of 1×10−19 F in a 1 kHz bandwidth. Feedback control is used to scan the tip at constant gap...

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Bibliographic Details
Published in:Applied physics letters 1989-07, Vol.55 (2), p.203-205
Main Authors: WILLIAMS, C. C, HOUGH, W. P, RISHTON, S. A
Format: Article
Language:English
Subjects:
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Other topics in instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
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Summary:A near-field capacitance microscope has been demonstrated on a 25 nm scale. A resonant circuit provides the means for sensing the capacitance variations between a sub-100-nm tip and surface with a sensitivity of 1×10−19 F in a 1 kHz bandwidth. Feedback control is used to scan the tip at constant gap across a sample, providing a means of noncontact surface profiling. Images of conducting and nonconducting structures are presented.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.102096