Superconducting Properties of Y-Ba-Cu-O Thin Films Prepared by RF Magnetron Sputtering with a Grid Electrode

Y-Ba-Cu-O thin films were prepared by an RF sputtering method with a DC-biased grid electrode inserted between a target and a substrate. When the grid was negatively biased at about -70 V, as-sputtered superconducting films with a c -axis orientation were obtained, while the films prepared without t...

Full description

Saved in:
Bibliographic Details
Published in:Japanese Journal of Applied Physics 1989-03, Vol.28 (3A), p.L434-L436
Main Authors: Takechi, Kazushige, Shiota, Tetsuyoshi, Hatou, Tsunehiro, Inoue, Masumi, Takai, Yoshiaki, Hayakawa, Hisao, Ohbayashi, Kazushige
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Y-Ba-Cu-O thin films were prepared by an RF sputtering method with a DC-biased grid electrode inserted between a target and a substrate. When the grid was negatively biased at about -70 V, as-sputtered superconducting films with a c -axis orientation were obtained, while the films prepared without the grid electrode but under the same condition showed neither superconductivity nor c -axis crystal orientation.
ISSN:0021-4922
1347-4065
DOI:10.1143/JJAP.28.L434