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Time sequential measurement of the precursor state of oxygen on the titanium surface by means of time-of-flight spectroscopy for electron stimulated desorption
An adsorption process of oxygen on the titanium single-crystal surface of (101̄0) has been investigated by means of a time-of-flight spectrometer for the electron stimulated desorption (ESD). An oxidation experiment has been performed at the oxygen pressure ranging from 1 to 8×10 -8 Torr. TOF spectr...
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Published in: | Japanese Journal of Applied Physics 1989-12, Vol.28 (12), p.2594-2596 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | An adsorption process of oxygen on the titanium single-crystal surface of (101̄0) has been investigated by means of a time-of-flight spectrometer for the electron stimulated desorption (ESD). An oxidation experiment has been performed at the oxygen pressure ranging from 1 to 8×10
-8
Torr. TOF spectra of ESD signals were obtained sequentially by a digital acquisition system. In an initial adsorption stage, the O
+
ESD signal intensity grew depending on the oxygen exposure. The O
+
signal peaks have the most probable kinetic energies of 3.5±0.4 eV and 1.8±0.2 eV. The higher-energy peak is identified as the ESD signal from molecularly adsorbed oxygen on the surface, and the lower one as that from the chemically adsorbed oxygen. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/jjap.28.2594 |