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Comparative Hall mobilities of ion implanted boron and implanted carbon plus boron in insulating diamond
Natural type IIa (insulating) diamonds were implanted at liquid nitrogen temperature with either boron or carbon plus boron. Van der Pauw resistivity and Hall effect measurements as a function of temperature were used to determine the effect of the implantation, in comparison with the unimplanted si...
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Published in: | Journal of the Electrochemical Society 1992-10, Vol.139 (10), p.2977-2979 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that cite this one |
Online Access: | Get full text |
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Summary: | Natural type IIa (insulating) diamonds were implanted at liquid nitrogen temperature with either boron or carbon plus boron. Van der Pauw resistivity and Hall effect measurements as a function of temperature were used to determine the effect of the implantation, in comparison with the unimplanted side of the sample. Implantation with carbon plus boron resulted in a carrier concentration more than an order of magnitude greater than that resulting from implantation with boron alone, but with a much lower hole mobility. |
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ISSN: | 0013-4651 1945-7111 |
DOI: | 10.1149/1.2069019 |