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Deposition system for SEM in situ' observation of growing crystals and the preliminary study of Zn vapor deposition

An apparatus for “ in situ ” observation of growing crystals in scanning electron microscope (SEM) was constructed. The design of the apparatus and the preliminary study of the growth of Zn crystals were described.

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Bibliographic Details
Published in:JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE 1992, Vol.31 (10), p.3422-3423
Main Authors: GONDA, T, TERANISHI, T, HIRAHARA, T, TANAKA, Y, YUMOTO, H, GOTOH, Y
Format: Article
Language:English
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Description
Summary:An apparatus for “ in situ ” observation of growing crystals in scanning electron microscope (SEM) was constructed. The design of the apparatus and the preliminary study of the growth of Zn crystals were described.
ISSN:0021-4922
1347-4065
DOI:10.1143/jjap.31.3422