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Deposition system for SEM in situ' observation of growing crystals and the preliminary study of Zn vapor deposition
An apparatus for “ in situ ” observation of growing crystals in scanning electron microscope (SEM) was constructed. The design of the apparatus and the preliminary study of the growth of Zn crystals were described.
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Published in: | JPN J APPL PHYS PART 1 REGUL PAP SHORT NOTE 1992, Vol.31 (10), p.3422-3423 |
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Main Authors: | , , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | An apparatus for “
in situ
” observation of growing crystals in scanning electron microscope (SEM) was constructed. The design of the apparatus and the preliminary study of the growth of Zn crystals were described. |
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ISSN: | 0021-4922 1347-4065 |
DOI: | 10.1143/jjap.31.3422 |