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Diffusion in multilayer structures of metal-carbon superthin films
The effect of annealing on the X-ray optical characteristics of artificial multilayer structures of superthin films (1–3 nm thicknesses) composed of metal (chromium, iron, nickel, molybdenum, rhodium, tungsten, platinum and others) and carbon is studied. The diffusion kinetics in multilayers is dete...
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Published in: | Thin solid films 1992-01, Vol.207 (1), p.19-23 |
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Main Authors: | , , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | The effect of annealing on the X-ray optical characteristics of artificial multilayer structures of superthin films (1–3 nm thicknesses) composed of metal (chromium, iron, nickel, molybdenum, rhodium, tungsten, platinum and others) and carbon is studied. The diffusion kinetics in multilayers is determined by analysing the variations in angular spectra of reflected “hard” (λ≈0.1 nm) and soft (λ≈1–10 nm) X-rays. It is shown experimentally that, for all investigated metallic materials, there is an annealing temperature range in which the X-ray reflectivity increases. The observed effect is explained by the carbon atom displacement into the metal region through the interface. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/0040-6090(92)90094-R |