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Effect of additives on the properties of the lead-borosilicate glasses and the thin-film coatings based on them

Several parameters must be optimised in order to develop glass coatings for reliable passivation of the p-n junctions of high-capacity semiconductor devices. The lead borosilicate system can be used to obtain such coatings by vacuum methods. The dependence of the coefficient of linear thermal expans...

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Bibliographic Details
Published in:Glass and ceramics 1992-02, Vol.49 (1-2), p.95-99
Main Authors: GROZHIK, V. A, BYCHKO, G. V, KHODSKII, L. G
Format: Article
Language:English
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Summary:Several parameters must be optimised in order to develop glass coatings for reliable passivation of the p-n junctions of high-capacity semiconductor devices. The lead borosilicate system can be used to obtain such coatings by vacuum methods. The dependence of the coefficient of linear thermal expansion, the temperature corresponding to the beginning of softening, the water resistance, the bulk resistivity, and the density on the composition in the presence of oxide additives (including CuO, CoO, MnO, TeO2, TiO2, SnO2, CeO2, Bi2O3, La2O3 and WO3) in glasses belonging to the SiO2-PbO-20B2O3-5SrO-5MgO-10Al2O3 system were studied. The effect of the additives on the water resistance of thin films of experimental glasses formed on Si substrates by thermal evaporation under vacuum was also examined. The results are discussed.
ISSN:0361-7610
1573-8515
DOI:10.1007/BF00676546