Patterning of Complex, Nanometer-Scale Features in Wide-Area Gold Nanoplasmonic Structures Using Helium Focused Ion Beam Milling

• Published in: ACS applied materials & interfaces 2021-09, Vol.13 (36), p.43209-43220
• Main Authors: Semple, Mitchell, Hryciw, Aaron C, Li, Peng, Flaim, Eric, Iyer, Ashwin K
• Format: Article
• Language: English
• Subjects: Functional Nanostructured Materials (including low-D carbon)
• ISSN: 1944-8244; 1944-8252
• DOI: 10.1021/acsami.1c09295

Meeting the evolving demands of plasmonics research requires increasingly precise control over surface plasmon properties, which necessitates extremely fine nanopatterning, complex geometries, and/or long-range order. Nanoplasmonic metasurfaces are representative of a modern research area requiring intricate, high-fidelity features reproduced over areas of several free-space wavelengths, making them one of the most challenging fabrication problems in the field today. This work presents a systematic study of the helium focused ion beam milling of gold for nanoplasmonic metasurface applications, using as its example a nanoplasmonic metasurface based on an array of nanometer-scale plasmonic-wire-loaded subwavelength apertures in a gold film. At each step, the pattern variations are compared to simulation to predict the experimental outcome. Our results show that even in a practical fabrication environment, helium ion beam milling can be used to reliably pattern 10 nm features into gold with 1:5 aspect ratio in complex geometries over a wide area.