Microstructure and ferroelectric properties of lead zirconate-titanate films produced by laser evaporation

Lead titanate-zirconate (PZT) films were produced by laser-induced vaporization from a PZT target with the use of a focused Q-switched Nd:YAG laser. Deposition was onto room-temperature platinum-covered silicon substrates. Although the films were initially amorphous, as indicated by X-rays, they cry...

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Bibliographic Details
Main Authors: Brody, P S, Benedetto, J M, Rod, B J, Bennett, K W, Cook, L P, Schenck, P K, Chiang, C K, Wong-Ng, W
Format: Conference Proceeding
Language:English
Online Access:Get full text
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Summary:Lead titanate-zirconate (PZT) films were produced by laser-induced vaporization from a PZT target with the use of a focused Q-switched Nd:YAG laser. Deposition was onto room-temperature platinum-covered silicon substrates. Although the films were initially amorphous, as indicated by X-rays, they crystallized when annealed. Energy dispersive X-ray results showed that the film and targets were similar in composition. Scanning electron microscope and optical dark field micrographs showed a structure which might be interpreted as a sintered assemblage of particulate. A pattern of platinum electrodes was sputter deposited onto each sample to form parallel plate capacitors for investigating dielectric and ferroelectric properties. For a 2.5- mu m-thick film annealed at 700 degree C, the relative dielectric constant was approximately that of the bulk target. Hysteresis loops were obtained. The remanent polarization was 5.1 mu C/cm super(2) measured at a 160-kV/cm peak sinusoidal field.