Laser-assisted deposition of nanometer structures using a scanning tunneling microscope

Nanometer-scale deposits as small as 1 nm have been made on graphite surfaces using laser-induced multiphoton fragmentation and ionization of trimethylaluminum (TMA) molecules in the tunneling junction of a scanning tunneling microscope. Laser radiation generates ions, which are guided to the surfac...

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Bibliographic Details
Published in:Applied physics letters 1990-12, Vol.57 (27), p.2913-2915
Main Authors: YAU, S.-T, SALTZ, D, NAYFEH, M. H
Format: Article
Language:English
Subjects:
Applied sciences
Condensed matter: structure, mechanical and thermal properties
Exact sciences and technology
Metals. Metallurgy
Physics
Solid surfaces and solid-solid interfaces
Surface and interface dynamics and vibrations
Surfaces and interfaces
thin films and whiskers (structure and nonelectronic properties)
Thin film structure and morphology
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Summary:Nanometer-scale deposits as small as 1 nm have been made on graphite surfaces using laser-induced multiphoton fragmentation and ionization of trimethylaluminum (TMA) molecules in the tunneling junction of a scanning tunneling microscope. Laser radiation generates ions, which are guided to the surface by the electric field between the tip and the surface. The resolution of this technique is limited by the extent of the field in the tunneling junction.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.103728