Materials Aspects of Integrated High Tc DC-SQUID Magnetometer Fabrication

An integrated high Tc dc-SQUID magnetometer is being developed. It has in total ten layers of five different materials including YBa sub 2 Cu sub 3 O sub 7--x and PrBa sub 2 Cu sub 3 O sub 7--x . Various materials aspects of the fabrication process are discussed, especially the smoothness of the fil...

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Bibliographic Details
Published in:Journal of alloys and compounds 1992-11, Vol.195, p.707-710
Main Authors: Hilgenkamp, J W M, IJsselsteijn, R P J, Rijnders, AJHM, Tavares, P A C, Flokstra, J, Rogalla, H
Format: Article
Language:English
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Summary:An integrated high Tc dc-SQUID magnetometer is being developed. It has in total ten layers of five different materials including YBa sub 2 Cu sub 3 O sub 7--x and PrBa sub 2 Cu sub 3 O sub 7--x . Various materials aspects of the fabrication process are discussed, especially the smoothness of the films and the techniques to obtain smooth edges. Cross-overs and superconducting window contacts were fabricated. The critical temperature of the window-contact is 84K (j sub c (77K) = 2 x 10 exp 5 A/cm exp 2 ) and the resistivity of the insulating SrTiO sub 3 layer in the cross-over is 6 x 10 exp 5 Omega cm at 77K. The complete coil often shows a small resistive component down to approx 50K. Ramp type and bi-epitaxial grain boundary dc-SQUIDs show voltage modulation up to 65 and 79K, respectively. Efforts to fabricate an integrated high T sub c dc-SQUID magnetometer are discussed.
ISSN:0925-8388