Modeling and prediction of tool influence function under complex edge in sub-aperture optical polishing

• Published in: Optics express 2021-07, Vol.29 (15), p.23582-23596
• Main Authors: Wan, Songlin, Wei, Chaoyang, Hu, Chen, Gu, Haojin, Shao, Jianda
• Format: Article
• Language: English
• ISSN: 1094-4087; 1094-4087
• DOI: 10.1364/OE.432318

Edge mis-figures are regarded as one of the most difficult technical issues in optical fabrication. At present, only the near straight-line edge tool influence function (TIF) can be fitted by a polynomial function, but it is difficult to unify a 2-D analytical model suitable for complex edge workpieces and various tools, due to the lack of the scientific understanding of the edge removal behavior. In this paper, a comprehensive mathematical model is proposed to reveal the mechanism of the edge effect and accurately predict the complex edge TIF. The concept of a nonlinear edge kernel is first proposed and verified that the nonlinear pressure can be characterized by convoluting the kernel with the edge contour, which can be easily adapted to complex edge cases; besides, the edge kernel obtaining algorithm is established. The linear pressure part is verified to be constrained by the moment balance formula, which occurs in universal joint tool. Besides, the basic pressure distribution is presented to compensate the pressure distortion caused by the uneven form of the tool pad. The introducing of these three parts makes the complex edge pressure modeled efficiently and matched perfectly with the FEA results. In addition, a series of TIF experiments were carried out on various complex edge workpieces and different tools, which could be well predicted by the proposed model in 2-D view.