Ir spectroscopic investigation of SiO sub 2 film structure

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Bibliographic Details
Published in:Thin solid films 1992-01, Vol.213 (2), p.164-169
Main Authors: Lisovskii, I P, Litovchenko, V G, Lozinskii, V G, Steblovskii, G I
Format: Article
Language:English
Online Access:Get full text
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Summary:Article abstract not included.
ISSN:0040-6090