Some properties of aluminium-nitride powder prepared by metal-organic chemical vapour deposition

Ultrafine aluminium-nitride (AlN) powders with primary particle sizes of 10–20 nm were prepared by a metal-organic chemical vapour deposition (MOCVD): trimethylaluminium (Al(CH 3) 3), triethylaluminium (Al(C 2H 5) 3) and triisobutylaluminium (Al(i-C 4H 9) 3)-vapours were reacted with ammonia (NH 3)...

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Bibliographic Details
Published in:Journal of the European Ceramic Society 1995, Vol.15 (7), p.661-666
Main Authors: Kubo, Kazuro, Itatani, Kiyoshi, Howell, F.Scott, Kishioka, Akira, Kinoshita, Makio
Format: Article
Language:English
Subjects:
Applied sciences
Building materials. Ceramics. Glasses
Ceramic industries
Chemical industry and chemicals
Chemistry
Colloidal state and disperse state
Exact sciences and technology
General and physical chemistry
Miscellaneous
Powders
Technical ceramics
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Summary:Ultrafine aluminium-nitride (AlN) powders with primary particle sizes of 10–20 nm were prepared by a metal-organic chemical vapour deposition (MOCVD): trimethylaluminium (Al(CH 3) 3), triethylaluminium (Al(C 2H 5) 3) and triisobutylaluminium (Al(i-C 4H 9) 3)-vapours were reacted with ammonia (NH 3) at 1050 °C. The sintered compacts with relative densities of ~95% could be fabricated by firing these compressed powders at temperatures as low as 1600 °C. The relative densities of the Al(CH 3) 3-derived and Al(C 2H 5) 3-derived compacts fired at 1800 °C for 10 h attained ~98%. The oxygen contents of these compacts were 1.8 and 4.7%, respectively.
ISSN:0955-2219
1873-619X
DOI:10.1016/0955-2219(95)00039-W