The deposition of niobium, NbN and Nb2O5 films by filtered arc evaporation

The films are smooth, with high superconductive critical temperature and large residual resistivity ratios. The oxide films also exhibit a high refractive index consistent with a high packing density. The filtered arc technique is shown to be a practical high-rate process for deposition of supercond...

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Bibliographic Details
Published in:Journal of materials science letters 1993-03, Vol.12 (5), p.322-323
Main Authors: BENDAVID, A, MARTIN, P. J, NETTERFIELD, R. P, SLOGGETT, G. J, KINDER, T. J, ANDRIKIDIS, C
Format: Article
Language:English
Subjects:
Applied sciences
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Ion and electron beam-assisted deposition
ion plating
Materials science
Metals. Metallurgy
Methods of deposition of films and coatings
film growth and epitaxy
Physics
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Summary:The films are smooth, with high superconductive critical temperature and large residual resistivity ratios. The oxide films also exhibit a high refractive index consistent with a high packing density. The filtered arc technique is shown to be a practical high-rate process for deposition of superconducting Nb, NbN and optical quality Nb2O5. 11 refs.
ISSN:0261-8028
1573-4811
DOI:10.1007/BF01910091