The deposition of niobium, NbN and Nb2O5 films by filtered arc evaporation

The films are smooth, with high superconductive critical temperature and large residual resistivity ratios. The oxide films also exhibit a high refractive index consistent with a high packing density. The filtered arc technique is shown to be a practical high-rate process for deposition of supercond...

Full description

Saved in:
Bibliographic Details
Published in:Journal of materials science letters 1993-03, Vol.12 (5), p.322-323
Main Authors: BENDAVID, A, MARTIN, P. J, NETTERFIELD, R. P, SLOGGETT, G. J, KINDER, T. J, ANDRIKIDIS, C
Format: Article
Language:English
Subjects:
Applied sciences
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Ion and electron beam-assisted deposition
ion plating
Materials science
Metals. Metallurgy
Methods of deposition of films and coatings
film growth and epitaxy
Physics
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
cited_by cdi_FETCH-LOGICAL-c289t-dda4af36238e0110aec9f517962e6bc9ea503683cc805ee53a67a259625c2423
cites cdi_FETCH-LOGICAL-c289t-dda4af36238e0110aec9f517962e6bc9ea503683cc805ee53a67a259625c2423
container_end_page 323
container_issue 5
container_start_page 322
container_title Journal of materials science letters
container_volume 12
creator BENDAVID, A
MARTIN, P. J
NETTERFIELD, R. P
SLOGGETT, G. J
KINDER, T. J
ANDRIKIDIS, C
description The films are smooth, with high superconductive critical temperature and large residual resistivity ratios. The oxide films also exhibit a high refractive index consistent with a high packing density. The filtered arc technique is shown to be a practical high-rate process for deposition of superconducting Nb, NbN and optical quality Nb2O5. 11 refs.
doi_str_mv 10.1007/BF01910091
format article
fullrecord <record><control><sourceid>proquest_cross</sourceid><recordid>TN_cdi_proquest_miscellaneous_25974086</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>25974086</sourcerecordid><originalsourceid>FETCH-LOGICAL-c289t-dda4af36238e0110aec9f517962e6bc9ea503683cc805ee53a67a259625c2423</originalsourceid><addsrcrecordid>eNpFkEtPwzAQhC0EEqVw4Rf4gDggAn7EiXOEivJQ1V5yjzbORhglcbBTpP57XLWC04x2v5nDEHLN2QNnLH98XjJeRFfwEzLjKpdJqjk_JTMmMp5oJvQ5uQjhi7F4UOmMfJSfSBscXbCTdQN1LR2sq-22v6frek1haKKKjaKt7fpA693eTOixoeANxR8YnYd99pKctdAFvDrqnJTLl3Lxlqw2r--Lp1VihC6mpGkghVZmQmpknDNAU7SK50UmMKtNgaCYzLQ0RjOFqCRkOQgV38qIVMg5uT3Ujt59bzFMVW-Dwa6DAd02VBHNU6azCN4dQONdCB7bavS2B7-rOKv2a1X_a0X45tgKwUDXehiMDX-JNE4pY-cvVFtnDg</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype><pqid>25974086</pqid></control><display><type>article</type><title>The deposition of niobium, NbN and Nb2O5 films by filtered arc evaporation</title><source>Springer Nature - Connect here FIRST to enable access</source><creator>BENDAVID, A ; MARTIN, P. J ; NETTERFIELD, R. P ; SLOGGETT, G. J ; KINDER, T. J ; ANDRIKIDIS, C</creator><creatorcontrib>BENDAVID, A ; MARTIN, P. J ; NETTERFIELD, R. P ; SLOGGETT, G. J ; KINDER, T. J ; ANDRIKIDIS, C</creatorcontrib><description>The films are smooth, with high superconductive critical temperature and large residual resistivity ratios. The oxide films also exhibit a high refractive index consistent with a high packing density. The filtered arc technique is shown to be a practical high-rate process for deposition of superconducting Nb, NbN and optical quality Nb2O5. 11 refs.</description><identifier>ISSN: 0261-8028</identifier><identifier>EISSN: 1573-4811</identifier><identifier>DOI: 10.1007/BF01910091</identifier><identifier>CODEN: JMSLD5</identifier><language>eng</language><publisher>Dordrecht: Kluwer Academic Publishers</publisher><subject>Applied sciences ; Cross-disciplinary physics: materials science; rheology ; Exact sciences and technology ; Ion and electron beam-assisted deposition; ion plating ; Materials science ; Metals. Metallurgy ; Methods of deposition of films and coatings; film growth and epitaxy ; Physics</subject><ispartof>Journal of materials science letters, 1993-03, Vol.12 (5), p.322-323</ispartof><rights>1993 INIST-CNRS</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c289t-dda4af36238e0110aec9f517962e6bc9ea503683cc805ee53a67a259625c2423</citedby><cites>FETCH-LOGICAL-c289t-dda4af36238e0110aec9f517962e6bc9ea503683cc805ee53a67a259625c2423</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>314,776,780,27901,27902</link.rule.ids><backlink>$$Uhttp://pascal-francis.inist.fr/vibad/index.php?action=getRecordDetail&amp;idt=4573386$$DView record in Pascal Francis$$Hfree_for_read</backlink></links><search><creatorcontrib>BENDAVID, A</creatorcontrib><creatorcontrib>MARTIN, P. J</creatorcontrib><creatorcontrib>NETTERFIELD, R. P</creatorcontrib><creatorcontrib>SLOGGETT, G. J</creatorcontrib><creatorcontrib>KINDER, T. J</creatorcontrib><creatorcontrib>ANDRIKIDIS, C</creatorcontrib><title>The deposition of niobium, NbN and Nb2O5 films by filtered arc evaporation</title><title>Journal of materials science letters</title><description>The films are smooth, with high superconductive critical temperature and large residual resistivity ratios. The oxide films also exhibit a high refractive index consistent with a high packing density. The filtered arc technique is shown to be a practical high-rate process for deposition of superconducting Nb, NbN and optical quality Nb2O5. 11 refs.</description><subject>Applied sciences</subject><subject>Cross-disciplinary physics: materials science; rheology</subject><subject>Exact sciences and technology</subject><subject>Ion and electron beam-assisted deposition; ion plating</subject><subject>Materials science</subject><subject>Metals. Metallurgy</subject><subject>Methods of deposition of films and coatings; film growth and epitaxy</subject><subject>Physics</subject><issn>0261-8028</issn><issn>1573-4811</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>1993</creationdate><recordtype>article</recordtype><recordid>eNpFkEtPwzAQhC0EEqVw4Rf4gDggAn7EiXOEivJQ1V5yjzbORhglcbBTpP57XLWC04x2v5nDEHLN2QNnLH98XjJeRFfwEzLjKpdJqjk_JTMmMp5oJvQ5uQjhi7F4UOmMfJSfSBscXbCTdQN1LR2sq-22v6frek1haKKKjaKt7fpA693eTOixoeANxR8YnYd99pKctdAFvDrqnJTLl3Lxlqw2r--Lp1VihC6mpGkghVZmQmpknDNAU7SK50UmMKtNgaCYzLQ0RjOFqCRkOQgV38qIVMg5uT3Ujt59bzFMVW-Dwa6DAd02VBHNU6azCN4dQONdCB7bavS2B7-rOKv2a1X_a0X45tgKwUDXehiMDX-JNE4pY-cvVFtnDg</recordid><startdate>19930301</startdate><enddate>19930301</enddate><creator>BENDAVID, A</creator><creator>MARTIN, P. J</creator><creator>NETTERFIELD, R. P</creator><creator>SLOGGETT, G. J</creator><creator>KINDER, T. J</creator><creator>ANDRIKIDIS, C</creator><general>Kluwer Academic Publishers</general><scope>IQODW</scope><scope>AAYXX</scope><scope>CITATION</scope><scope>7QQ</scope><scope>8FD</scope><scope>JG9</scope></search><sort><creationdate>19930301</creationdate><title>The deposition of niobium, NbN and Nb2O5 films by filtered arc evaporation</title><author>BENDAVID, A ; MARTIN, P. J ; NETTERFIELD, R. P ; SLOGGETT, G. J ; KINDER, T. J ; ANDRIKIDIS, C</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c289t-dda4af36238e0110aec9f517962e6bc9ea503683cc805ee53a67a259625c2423</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>1993</creationdate><topic>Applied sciences</topic><topic>Cross-disciplinary physics: materials science; rheology</topic><topic>Exact sciences and technology</topic><topic>Ion and electron beam-assisted deposition; ion plating</topic><topic>Materials science</topic><topic>Metals. Metallurgy</topic><topic>Methods of deposition of films and coatings; film growth and epitaxy</topic><topic>Physics</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>BENDAVID, A</creatorcontrib><creatorcontrib>MARTIN, P. J</creatorcontrib><creatorcontrib>NETTERFIELD, R. P</creatorcontrib><creatorcontrib>SLOGGETT, G. J</creatorcontrib><creatorcontrib>KINDER, T. J</creatorcontrib><creatorcontrib>ANDRIKIDIS, C</creatorcontrib><collection>Pascal-Francis</collection><collection>CrossRef</collection><collection>Ceramic Abstracts</collection><collection>Technology Research Database</collection><collection>Materials Research Database</collection><jtitle>Journal of materials science letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>BENDAVID, A</au><au>MARTIN, P. J</au><au>NETTERFIELD, R. P</au><au>SLOGGETT, G. J</au><au>KINDER, T. J</au><au>ANDRIKIDIS, C</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>The deposition of niobium, NbN and Nb2O5 films by filtered arc evaporation</atitle><jtitle>Journal of materials science letters</jtitle><date>1993-03-01</date><risdate>1993</risdate><volume>12</volume><issue>5</issue><spage>322</spage><epage>323</epage><pages>322-323</pages><issn>0261-8028</issn><eissn>1573-4811</eissn><coden>JMSLD5</coden><abstract>The films are smooth, with high superconductive critical temperature and large residual resistivity ratios. The oxide films also exhibit a high refractive index consistent with a high packing density. The filtered arc technique is shown to be a practical high-rate process for deposition of superconducting Nb, NbN and optical quality Nb2O5. 11 refs.</abstract><cop>Dordrecht</cop><pub>Kluwer Academic Publishers</pub><doi>10.1007/BF01910091</doi><tpages>2</tpages></addata></record>
fulltext fulltext
identifier ISSN: 0261-8028
ispartof Journal of materials science letters, 1993-03, Vol.12 (5), p.322-323
issn 0261-8028
1573-4811
language eng
recordid cdi_proquest_miscellaneous_25974086
source Springer Nature - Connect here FIRST to enable access
subjects Applied sciences
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Ion and electron beam-assisted deposition
ion plating
Materials science
Metals. Metallurgy
Methods of deposition of films and coatings
film growth and epitaxy
Physics
title The deposition of niobium, NbN and Nb2O5 films by filtered arc evaporation
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-10T16%3A24%3A03IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=The%20deposition%20of%20niobium,%20NbN%20and%20Nb2O5%20films%20by%20filtered%20arc%20evaporation&rft.jtitle=Journal%20of%20materials%20science%20letters&rft.au=BENDAVID,%20A&rft.date=1993-03-01&rft.volume=12&rft.issue=5&rft.spage=322&rft.epage=323&rft.pages=322-323&rft.issn=0261-8028&rft.eissn=1573-4811&rft.coden=JMSLD5&rft_id=info:doi/10.1007/BF01910091&rft_dat=%3Cproquest_cross%3E25974086%3C/proquest_cross%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-c289t-dda4af36238e0110aec9f517962e6bc9ea503683cc805ee53a67a259625c2423%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_pqid=25974086&rft_id=info:pmid/&rfr_iscdi=true