Structure of laser deposited metallic alloys

The structure of metallic alloys grown by pulsed KrF laser deposition is examined by x-ray diffraction and compared with results from literature on sputtered and evaporated films. In general, the phases and structures obtained are similar, while laser deposited films often exhibit unusually enlarged...

Full description

Saved in:
Bibliographic Details
Published in:Journal of applied physics 1995-12, Vol.78 (12), p.7080-7087
Main Authors: Störmer, Michael, Krebs, Hans-Ulrich
Format: Article
Language:English
Citations: Items that this one cites
Items that cite this one
Online Access:Get full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The structure of metallic alloys grown by pulsed KrF laser deposition is examined by x-ray diffraction and compared with results from literature on sputtered and evaporated films. In general, the phases and structures obtained are similar, while laser deposited films often exhibit unusually enlarged lattice parameters in direction of growth, small grain sizes, larger extensions of the single-phase regions and sometimes better alignment of the grains. These differences can be explained by the approximately 105 times higher instantaneous deposition rate of the pulsed laser ablation process and the high kinetic energy of the deposited particles of up to more than 100 eV.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.360414