Hydrogen diffusion and reaction processes in thin films investigated by real-time spectroscopic ellipsometry [SE]

Multichannel SE was used to study the kinetics of thin-film modification by H in vacuum and electrochemical environments. Focus was on the hydrogenation of a-Si films in vacuum by exposure to thermally generated atomic H. Results were included for the coloration of WO sub 3 by electrochemical incorp...

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Bibliographic Details
Published in:Thin solid films 1993-01, Vol.33 (1-2), p.276-280
Main Authors: An, Il-Sin, Collins, R W, Nguyen, Hien-V, Vedam, K, Witham, H S, Messier, R
Format: Article
Language:English
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Summary:Multichannel SE was used to study the kinetics of thin-film modification by H in vacuum and electrochemical environments. Focus was on the hydrogenation of a-Si films in vacuum by exposure to thermally generated atomic H. Results were included for the coloration of WO sub 3 by electrochemical incorporation of H.
ISSN:0040-6090