Wafer level testing for semiconductor laser manufacture via spatially resolved photoluminescence

High bandwidth telecommunications depends on the efficient manufacture of semiconductor lasers. The quality of partially processed laser structures can be monitored at the wafer level by spatially resolved photoluminescence (SRPL), providing timely feedback to processing engineers. The same testing...

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Bibliographic Details
Published in:IEEE journal of selected topics in quantum electronics 1995-12, Vol.1 (4), p.980-986
Main Authors: Carver, G.E., Heebner, R.W., Astfalk, G.
Format: Article
Language:English
Subjects:
Bandwidth
Laser feedback
Monitoring
Optical materials
Photoluminescence
Semiconductor device manufacture
Semiconductor device testing
Semiconductor lasers
Semiconductor materials
Spatial resolution
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Summary:High bandwidth telecommunications depends on the efficient manufacture of semiconductor lasers. The quality of partially processed laser structures can be monitored at the wafer level by spatially resolved photoluminescence (SRPL), providing timely feedback to processing engineers. The same testing procedure can also be applied at the chip level. This allows comparisons of wafer level material quality, chip level material quality, and chip performance.
ISSN:1077-260X
1558-4542
DOI:10.1109/2944.488395