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Ellipsometric investigations in situ of thin ytterbium layers
Ellipsometric measurements were carried on during the vacuum deposition of thin ytterbium layers. Optical constants of ytterbium layers were determined. Ellipsometric parameters were also measured during the exposure of ytterbium layers to the atmosphere. The thickness dependence of the ytterbium ox...
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Published in: | Thin solid films 1993-03, Vol.224 (2), p.217-220 |
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Main Authors: | , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | Ellipsometric measurements were carried on during the vacuum deposition of thin ytterbium layers. Optical constants of ytterbium layers were determined. Ellipsometric parameters were also measured during the exposure of ytterbium layers to the atmosphere. The thickness dependence of the ytterbium oxide layers vs. time was estimated. |
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ISSN: | 0040-6090 1879-2731 |
DOI: | 10.1016/0040-6090(93)90435-R |