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Ellipsometric investigations in situ of thin ytterbium layers

Ellipsometric measurements were carried on during the vacuum deposition of thin ytterbium layers. Optical constants of ytterbium layers were determined. Ellipsometric parameters were also measured during the exposure of ytterbium layers to the atmosphere. The thickness dependence of the ytterbium ox...

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Bibliographic Details
Published in:Thin solid films 1993-03, Vol.224 (2), p.217-220
Main Authors: Zukowska, Krystyna, Oleszkiewicz, Ewa
Format: Article
Language:English
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Summary:Ellipsometric measurements were carried on during the vacuum deposition of thin ytterbium layers. Optical constants of ytterbium layers were determined. Ellipsometric parameters were also measured during the exposure of ytterbium layers to the atmosphere. The thickness dependence of the ytterbium oxide layers vs. time was estimated.
ISSN:0040-6090
1879-2731
DOI:10.1016/0040-6090(93)90435-R