Analysis of boron in CVD diamond surfaces using neutron depth profiling

Neutron depth profiling (NDP) is a method of near surface analysis for isotopes that undergo neutron-induced positive Q-value charged particle reactions, e.g., (n,alpha), (n,p). Because of its large cross section and large Q-value, the 10B(n,α) 7Li reaction has been widely employed for NDP studies....

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Bibliographic Details
Published in:Applied surface science 1993-03, Vol.65 (1-4), p.587-592
Main Authors: Lamaze, G.P., Downing, R.G., Pilione, L., Badzian, A., Badzian, T.
Format: Article
Language:English
Subjects:
Analytical chemistry
Applied sciences
Chemistry
Exact sciences and technology
Metals. Metallurgy
Spectrometric and optical methods
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Summary:Neutron depth profiling (NDP) is a method of near surface analysis for isotopes that undergo neutron-induced positive Q-value charged particle reactions, e.g., (n,alpha), (n,p). Because of its large cross section and large Q-value, the 10B(n,α) 7Li reaction has been widely employed for NDP studies. We have used the NDP technique to study the concentration and distribution of boron in CVD diamond layers. The measurements were made using the new Cold Neutron Depth Profiling instrument at the NIST Cold Neutron Research Facility. The diamond samples were prepared at the Materials Research Laboratory at the Pennsylvania State University. The doped diamond single crystal films were grown by microwave plasma chemical vapor deposition from a mixture of methane, hydrogen and diborane. Natural type IIa crystals cut along the (001) plane were used as substrates. Results of the measurements are presented.
ISSN:0169-4332
1873-5584
DOI:10.1016/0169-4332(93)90723-O