Diffraction optics for X-ray imaging

Diffraction optics for X-ray imaging are being used, for example, for X-ray microscopy experiments. In this paper the fabrication of high resolution zone plates and condenser zone plates is discussed. The fabrication techniques described include electron beam lithography, UV laser lithography, and p...

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Bibliographic Details
Published in:Microelectronic engineering 1996, Vol.32 (1), p.351-367
Main Authors: Schmahl, G., Rudolph, D., Schneider, G., Thieme, J., Schliebe, T., Kaulich, B., Hettwer, M.
Format: Article
Language:English
Subjects:
Diffraction optics
Electron beam lithography
Pattern transfer
Reactive ion etching
UV laser lithography
X-ray microscopy
Zone plates
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Summary:Diffraction optics for X-ray imaging are being used, for example, for X-ray microscopy experiments. In this paper the fabrication of high resolution zone plates and condenser zone plates is discussed. The fabrication techniques described include electron beam lithography, UV laser lithography, and pattern transfer by reactive ion etching. Zone plates with outermost zone widths down to 19 nm have been built.
ISSN:0167-9317
1873-5568
DOI:10.1016/0167-9317(95)00177-8