In situ growth of superconducting YBaCuO thin films by ion-beam sputtering method

Superconducting YBaCuO thin films have been grown in situ on YSZ and SrTiO 3 substrates by ion-beam sputtering of a single nonstoichiometric target. Growth conditions were investigated. The best films grown under the optimal conditions exhibited zero-resistance temperatures of up to 90 K and a tr...

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Bibliographic Details
Published in:Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 1993-09, Vol.21 (1), p.5-9
Main Authors: Bagulya, A.V., Kazakov, I.P., Negodaev, M.A., Tsekhosh, V.I., Voronov, V.V.
Format: Article
Language:English
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Summary:Superconducting YBaCuO thin films have been grown in situ on YSZ and SrTiO 3 substrates by ion-beam sputtering of a single nonstoichiometric target. Growth conditions were investigated. The best films grown under the optimal conditions exhibited zero-resistance temperatures of up to 90 K and a transition width of ≈ 1 K.
ISSN:0921-5107
1873-4944
DOI:10.1016/0921-5107(93)90257-N