Interlaboratory tests of a composite reference sample to calibrate Auger electron spectrometers in the differential mode

A robust reference material has been designed to calibrate the intensity/energy response function of Auger electron spectrometers operated in the differential mode. This material has been tested on six instruments from three manufacturers in five laboratories. The results show that the calibration m...

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Bibliographic Details
Published in:Journal of electron spectroscopy and related phenomena 1993-01, Vol.61 (2), p.173-182
Main Authors: Seah, M.P., Hunt, C.P., Sykes, D., Valeri, S., Muller, R., Lamb, B.
Format: Article
Language:English
Subjects:
Electron, positron and ion microscopes, electron diffractometers and related techniques
Exact sciences and technology
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Physics
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Summary:A robust reference material has been designed to calibrate the intensity/energy response function of Auger electron spectrometers operated in the differential mode. This material has been tested on six instruments from three manufacturers in five laboratories. The results show that the calibration methodology is consistent with previous work for Auger electron spectrometers used in the direct mode and that intensity variations of a factor of two in range, which would occur in quantification without the calibration, may now be reduced to around 5%.
ISSN:0368-2048
1873-2526
DOI:10.1016/0368-2048(93)80049-R